Ionized Physical Vapor Deposition: 27 (Thin Films) Book PDF, ePub eBook

Join our eBook service for unlimited books & audiobooks. Get a free 7 day subscription! ↓↓↓↓↓


Book Descriptions:
This volume provides the first comprehensive look at a pivotal new technology in integrated circuit fabrication. For some time researchers have sought alternate processes for interconnecting the millions of transistors on each chip because conventional physical vapor deposition can no longer meet the specifications of today's complex integrated circuits. Out of this research, ionized physical vapor deposition has emerged as a premier technology for the deposition of thin metal films that form the dense interconnect wiring on state-of-the-art microprocessors and memory chips.

For the first time, the most recent developments in thin film deposition using ionized physical vapor deposition (I-PVD) are presented in a single coherent source. Readers will find detailed descriptions of relevant plasma source technology, specific deposition systems, and process recipes. The tools and processes covered include DC hollow cathode magnetrons, RF inductively coupled plasmas, and microwave plasmas that are used for depositing technologically important materials such as copper, tantalum, titanium, TiN, and aluminum. In addition, this volume describes the important physical processes that occur in I-PVD in a simple and concise way. The physical descriptions are followed by experimentally-verified numerical models that provide in-depth insight into the design and operation I-PVD tools.

Practicing process engineers, research and development scientists, and students will find that this book's integration of tool design, process development, and fundamental physical models make it an indispensable reference.

Key Features:

The first comprehensive volume on ionized physical vapor deposition
Combines tool design, process development, and fundamental physical understanding to form a complete picture of I-PVD
Emphasizes practical applications in the area of IC fabrication and interconnect technology
Serves as a guide to select the most appropriate technology for any deposition application




*This single source saves time and effort by including comprehensive information at one's finger tips
*The integration of tool design, process development, and fundamental physics allows the reader to quickly understand all of the issues important to I-PVD
*The numerous practical applications assist the working engineer to select and refine thin film processes

Ionized Physical Vapor Deposition: 27 (Thin Films)

From reader reviews:

Virginia Smith:

Why don't make it to be your habit? Right now, try to ready your time to do the important action, like looking for your favorite e-book and reading a publication. Beside you can solve your short lived problem; you can add your knowledge by the book entitled Ionized Physical Vapor Deposition: 27 (Thin Films). Try to the actual book Ionized Physical Vapor Deposition: 27 (Thin Films) as your good friend. It means that it can to become your friend when you sense alone and beside those of course make you smarter than previously. Yeah, it is very fortuned to suit your needs. The book makes you considerably more confidence because you can know almost everything by the book. So , let's make new experience and also knowledge with this book.

Willard Edwards:

The book Ionized Physical Vapor Deposition: 27 (Thin Films) give you a sense of feeling enjoy for your spare time. You can use to make your capable much more increase. Book can being your best friend when you getting tension or having big problem with the subject. If you can make looking at a book Ionized Physical Vapor Deposition: 27 (Thin Films) to become your habit, you can get far more advantages, like add your own personal capable, increase your knowledge about several or all subjects. You may know everything if you like wide open and read a guide Ionized Physical Vapor Deposition: 27 (Thin Films). Kinds of book are a lot of. It means that, science book or encyclopedia or other people. So , how do you think about this guide?

Margie Rodriguez:

Here thing why this specific Ionized Physical Vapor Deposition: 27 (Thin Films) are different and reliable to be yours. First of all reading a book is good but it really depends in the content of it which is the content is as delicious as food or not. Ionized Physical Vapor Deposition: 27 (Thin Films) giving you information deeper and different ways, you can find any publication out there but there is no reserve that similar with Ionized Physical Vapor Deposition: 27 (Thin Films). It gives you thrill examining journey, its open up your eyes about the thing which happened in the world which is probably can be happened around you. It is possible to bring everywhere like in recreation area, café, or even in your way home by train. Should you be having difficulties in bringing the branded book maybe the form of Ionized Physical Vapor Deposition: 27 (Thin Films) in e-book can be your choice.

Aurora Ammon:

Can you one of the book lovers? If so, do you ever feeling doubt when you find yourself in the book store? Aim to pick one book that you find out the inside because don't ascertain book by its cover may doesn't work is difficult job because you are scared that the inside maybe not because fantastic as in the outside look likes. Maybe you answer could be Ionized Physical Vapor Deposition: 27 (Thin Films) why because the great cover that make you consider in regards to the content will not disappoint an individual. The inside or content is actually fantastic as the outside or even cover. Your reading sixth sense will directly assist you to pick up this book.